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Subjects
Thin filmsEdition | Availability |
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1
Modeling of film deposition for microelectronic applications
1996, Academic Press
in English
0125330227 9780125330220
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Book Details
Table of Contents
Michael J. Brett, Steven K. Dew, and Tom J. Smy
Michael J. Brett, Steven K. Dew, and Tom J. Smy -- S. Hamaguchi
Michael J. Brett, Steven K. Dew, and Tom J. Smy -- S. Hamaguchi -- C.-C.Fang, [et al.]
Michael J. Brett, Steven K. Dew, and Tom J. Smy-- S. Hamaguchi-- C.-C.Fang, [et al.]-- Timothy S. Cale and Vadali Mahadev
Edition Notes
Includes bibliographical references and indexes
The Physical Object
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History
- Created September 26, 2008
- 3 revisions
Wikipedia citation
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September 17, 2024 | Edited by ImportBot | import existing book |
April 16, 2010 | Edited by bgimpertBot | Added goodreads ID. |
September 26, 2008 | Created by ImportBot | Imported from Miami University of Ohio MARC record |