Optical/laser microlithography VII

2-4 March 1994, San Jose, California

Optical/laser microlithography VII
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Last edited by MARC Bot
July 31, 2019 | History

Optical/laser microlithography VII

2-4 March 1994, San Jose, California

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Publish Date
Language
English
Pages
1008

Buy this book

Previews available in: English

Edition Availability
Cover of: Optical/laser microlithography VII
Optical/laser microlithography VII: 2-4 March 1994, San Jose, California
1994, SPIE--the International Society for Optical Engineering
in English
Cover of: Optical Laser Microlithography Vii/V2197
Optical Laser Microlithography Vii/V2197
February 1994, Society of Photo Optical, SPIE--the International Society for Optical Engineering
Paperback in English

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Book Details


Edition Notes

Includes bibliographical references and index.

Published in
Bellingham, Wash
Series
SPIE proceedings -- . 2197, Proceedings of SPIE--the International Society for Optical Engineering -- v. 2197.

The Physical Object

Pagination
xiii, 1008 p. :
Number of pages
1008

Edition Identifiers

Open Library
OL15358645M
ISBN 10
0819414921
LCCN
94065792

Work Identifiers

Work ID
OL9256487W

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Download catalog record: RDF / JSON / OPDS | Wikipedia citation
July 31, 2019 Edited by MARC Bot associate edition with work OL9256487W
September 19, 2008 Created by ImportBot Imported from Western Washington University MARC record