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Previews available in: English
Edition | Availability |
---|---|
1
Optical/laser microlithography VII: 2-4 March 1994, San Jose, California
1994, SPIE--the International Society for Optical Engineering
in English
0819414921 9780819414922
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2
Optical Laser Microlithography Vii/V2197
February 1994, Society of Photo Optical, SPIE--the International Society for Optical Engineering
Paperback
in English
0819414921 9780819414922
|
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Book Details
Edition Notes
Includes bibliographical references and index.
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- Created September 19, 2008
- 2 revisions
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July 31, 2019 | Edited by MARC Bot | associate edition with work OL9256487W |
September 19, 2008 | Created by ImportBot | Imported from Western Washington University MARC record |