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Previews available in: English
Edition | Availability |
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Design, Test, Integration, and Packaging of Mems/Moems: 9-11 May 2000, Paris, France (Proceedings of Spie--the International Society for Optical Engineering, V. 4019.)
June 2000, SPIE-International Society for Optical Engine
Paperback
in English
0819436453 9780819436450
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