An edition of OSA proceedings on extreme ultraviolet lithography (1995)

OSA proceedings on extreme ultraviolet lithography

proceedings of the topical meeting, September 19-21, 1994, Monterey, California

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OSA proceedings on extreme ultraviolet lithog ...
edited by Frits Zernike and Da ...
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Last edited by MARC Bot
November 18, 2020 | History
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An edition of OSA proceedings on extreme ultraviolet lithography (1995)

OSA proceedings on extreme ultraviolet lithography

proceedings of the topical meeting, September 19-21, 1994, Monterey, California

by and

  • 0 Ratings
  • 0 Want to read
  • 0 Currently reading
  • 0 Have read

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Publish Date
Publisher
The Society
Language
English
Pages
283

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Subjects
Ultraviolet radiation, Congresses, Photolithography, Lasers, Industrial applications, Optical coatings, Interferometry

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Edition Availability
Cover of: Osa Proceedings on Extreme Ultraviolet Lithography
Osa Proceedings on Extreme Ultraviolet Lithography: Proceedings of the Tropical Meeting, September 19-21, 1994 Monterey, California
March 1995, American Society of Civil Engineers
Hardcover in English
Libraries near you: WorldCat
Cover of: OSA proceedings on extreme ultraviolet lithography
OSA proceedings on extreme ultraviolet lithography: proceedings of the topical meeting, September 19-21, 1994, Monterey, California
1995, The Society
in English
  • Not in Library
Libraries near you: WorldCat

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Book Details

Edition Notes

Includes bibliographical references and index.
"Volume 23."

Published in
Washington, DC
Other Titles
Extreme ultraviolet lithography.

Classifications

Library of Congress
TS517.2 .O83 1995

The Physical Object

Pagination
xi, 283 p. :
Number of pages
283

ID Numbers

Open Library
OL1124257M
ISBN 10
1557523630
LCCN
94065375
OCLC/WorldCat
32867989
Goodreads
4743968

Source records

Scriblio MARC record
Library of Congress MARC record

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History

Download catalog record: RDF / JSON / OPDS | Wikipedia citation
November 18, 2020 Edited by MARC Bot import existing book
February 18, 2019 Edited by MARC Bot import existing book
April 16, 2010 Edited by bgimpertBot Added goodreads ID.
April 1, 2008 Created by an anonymous user Imported from Scriblio MARC record