An edition of Handbook of microlithography, micromachining, and microfabrication
(1997)
Handbook of microlithography, micromachining, and microfabrication
by P. Rai-Choudhury
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Publish Date
1997
Publisher
SPIE Optical Engineering Press,
Institution of Electrical Engineers,
Brand: Society of Photo-Optical Instrumentation Engineers,
Society of Photo-Optical Instrumentation Engineers
Language
English
Pages
768
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Previews available in: English
Subjects
Micromachining, Microfabrication, Microlithography| Edition | Availability |
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1
Handbook of microlithography, micromachining, and microfabrication
1997, SPIE Optical Engineering Press, Institution of Electrical Engineers, Brand: Society of Photo-Optical Instrumentation Engineers, Society of Photo-Optical Instrumentation Engineers
in English
0819423785 9780819423788
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Book Details
Table of Contents
v. 1. Microlithography
v. 2. Micromachining and microfabrication.
Edition Notes
Includes bibliographical references and indexes.
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History
- Created April 1, 2008
- 12 revisions
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| July 11, 2024 | Edited by MARC Bot | import existing book |
| May 23, 2023 | Edited by ImportBot | import existing book |
| April 8, 2023 | Edited by ImportBot | import existing book |
| December 25, 2021 | Edited by ImportBot | import existing book |
| April 1, 2008 | Created by an anonymous user | Imported from Scriblio MARC record |