An edition of Optical microlithography and metrology for microcircuit fabrication (1989)

Optical microlithography and metrology for microcircuit fabrication

proceedings, ECO2, 27-28 April, 1989, Paris, France

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Cover of: Optical microlithography and metrology for microcircuit fabrication by European Congress on Optics (2nd 1989 Paris, France)
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Last edited by Open Library Bot
December 4, 2010 | History
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An edition of Optical microlithography and metrology for microcircuit fabrication (1989)

Optical microlithography and metrology for microcircuit fabrication

proceedings, ECO2, 27-28 April, 1989, Paris, France

by

  • 0 Ratings
  • 0 Want to read
  • 0 Currently reading
  • 0 Have read

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Publish Date
Publisher
SPIE
Language
English
Pages
206

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Previews available in: English

Subjects
Congresses, Design and construction, Integrated circuits, Microlithography
Edition Availability
Cover of: Optical microlithography and metrology for microcircuit fabrication
Optical microlithography and metrology for microcircuit fabrication: proceedings, ECO2, 27-28 April, 1989, Paris, France
1989, SPIE
in English
Libraries near you: WorldCat

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Book Details

Edition Notes

Includes bibliographical references and index.
"The Congress of EPS--European Physical Society, Europtica--the European Federation for Applied Optics, SPIE--the International Society for Optical Engineering; cooperating organizations, ANRT--Association nationale de la recherche technique ... [et al.]."

Published in
Bellingham, Wash., USA
Series
SPIE proceedings series ;, v. 1138, Proceedings of SPIE--the International Society for Optical Engineering ;, v. 1138.

Classifications

Dewey Decimal Class
621.381/5
Library of Congress
TK7874 .E785 1989

The Physical Object

Pagination
vii, 206 p. :
Number of pages
206

ID Numbers

Open Library
OL2223907M
Internet Archive
opticalmicrolith1138euro
ISBN 10
0819401749
LCCN
89062616
OCLC/WorldCat
21136665
Goodreads
4007642

Source records

Library of Congress MARC record
Internet Archive item record
marc_columbia MARC record

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History

Download catalog record: RDF / JSON
December 4, 2010 Edited by Open Library Bot Added subjects from MARC records.
April 28, 2010 Edited by Open Library Bot Linked existing covers to the work.
December 10, 2009 Created by WorkBot add works page