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Previews available in: English
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Optical microlithography and metrology for microcircuit fabrication: proceedings, ECO2, 27-28 April, 1989, Paris, France
1989, SPIE
in English
0819401749 9780819401748
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Book Details
Edition Notes
Includes bibliographical references and index.
"The Congress of EPS--European Physical Society, Europtica--the European Federation for Applied Optics, SPIE--the International Society for Optical Engineering; cooperating organizations, ANRT--Association nationale de la recherche technique ... [et al.]."
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Feedback?December 4, 2010 | Edited by Open Library Bot | Added subjects from MARC records. |
April 28, 2010 | Edited by Open Library Bot | Linked existing covers to the work. |
December 10, 2009 | Created by WorkBot | add works page |