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An edition of Comptes rendus des travaux du CIP G87 (1987)

Comptes rendus des travaux du CIP G87

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Comptes rendus des travaux du CIP G87
International Colloquium on Pl...
Comptes rendus des travaux du CIP G87 by International Colloquium on Plasmas and Sputtering (6th 1987 Antibes, France), International Colloquium on Plasmas and Sputtering (6th 1987 Antibes, France)
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Last edited by Open Library Bot
December 4, 2010 | History
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An edition of Comptes rendus des travaux du CIP G87 (1987)

Comptes rendus des travaux du CIP G87

by

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Publish Date
Publisher
Société française du vide
Language
English
Pages
280

Subjects

Cathode sputtering (Plating process) Congresses Microelectronics Plasma etching Thin films
Edition Availability
Cover of: Comptes rendus des travaux du CIP G87
Comptes rendus des travaux du CIP G87
1987, Société française du vide
in English
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Book Details

Edition Notes

Includes bibliographical references.
English and French.
"Supplément à la revue 'Le Vide, les couches minces' no 237; ISSN 0223-4335"--Cover.

Published in
Paris
Other Titles
Vide, les couches minces. No 237 (Supplement), CIP G87.

Classifications

Dewey Decimal Class
621.381
Library of Congress
TK7874 .I567 1987

The Physical Object

Pagination
280 p. :
Number of pages
280

Edition Identifiers

Open Library
OL1955125M
LCCN
90183143

Work Identifiers

Work ID
OL4553725W

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