"This book thoroughly reviews basic thin film technology and deposition processes, sputtering processes, structural control of compound thin films, and microfabrication by sputtering. It contains the newest experimental and technological information about ceramic thin films, a key technology for nanomaterials in high-speed information applications and large-area functional coatings. This book is an invaluable resource for scientists, engineers, and graduate students in the semiconductor, energy, environment, vehicle, medical, and food industries."--BOOK JACKET.
Previews available in: English
Subjects
| Edition | Availability |
|---|---|
1
Thin film materials technology: sputtering of compound materials
2004, William Andrew Pub., Springer-Verlag
in English
0815514832 9780815514831
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2
Thin Film Materials Technology: Sputtering of Compound Materials
2004, Elsevier Science & Technology Books
in English
0815519311 9780815519317
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Book Details
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Includes bibliographical references and index
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