An edition of On electron beam lithography for LSI circuit fabrication (1979)

On electron beam lithography for LSI circuit fabrication

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On electron beam lithography for LSI circuit ...
Börje Åstrand, Börje Åstrand
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Last edited by MARC Bot
December 12, 2024 | History
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An edition of On electron beam lithography for LSI circuit fabrication (1979)

On electron beam lithography for LSI circuit fabrication

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Publish Date
Publisher
Royal Institute of Technology, Dept. of Applied Electronics
Language
English
Pages
14

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Subjects

Electron beam Lithography, Integrated circuits, Large scale integration
Edition Availability
Cover of: On electron beam lithography for LSI circuit fabrication
On electron beam lithography for LSI circuit fabrication
1979, Royal Institute of Technology, Dept. of Applied Electronics
in English

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Book Details

Edition Notes

Thesis (doctoral)--Kungliga Tekniska Högskolan, Stockholm, 1979.

Bibliography: leaves 13-14.

Published in
Stockholm

The Physical Object

Pagination
14 leaves
Number of pages
14

Edition Identifiers

Open Library
OL57190430M
OCLC/WorldCat
7157665

Work Identifiers

Work ID
OL42144524W

Source records

Harvard University record

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