An edition of Antireflecting-chromium linewidth standard, SRM 473, for calibration of optical microscope linewidth measuring systems
(1992)
Antireflecting-chromium linewidth standard, SRM 473, for calibration of optical microscope linewidth measuring systems
standard reference materials
by Carol F. Vezzetti
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Last edited by Open Library Bot
December 3, 2010 | History
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Publish Date
1992
Publisher
U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology,
For sale by the Supt. of Docs., U.S. G.P.O.
Language
English
Pages
36
Buy this book
Subjects
Calibration, Chromium, Integrated circuits, Masks, Measurement, Microscopes, Spectra, StandardsShowing 6 featured editions. View all 6 editions?
| Edition | Availability |
|---|---|
1
Antireflecting-chromium linewidth standard, SRM 473, for calibration of optical microscope linewidth measuring systems: standard reference materials
1992, U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology, Order from National Technical Information Service
Microform
in English
|
zzzz
|
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2
Antireflecting-chromium linewidth standard, SRM 473, for calibration of optical microscope linewidth measuring systems: standard reference materials
1992, U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology, For sale by the Supt. of Docs., U.S. G.P.O.
in English
|
aaaa
|
|
3
Antireflecting-chromium linewidth standard, SRM 473, for calibration of optical microscope linewidth measuring systems: standard reference materials
1992, U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology, Order from National Technical Information Service
Microform
in English
|
zzzz
|
|
4
Antireflecting-chromium linewidth standard, SRM 473, for calibration of optical microscope linewidth measuring systems: standard reference materials
1992, U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology, Order from National Technical Information Service
Microform
in English
|
zzzz
|
|
5
Antireflecting-chromium linewidth standard, SRM 473, for calibration of optical microscope linewidth measuring systems: standard reference materials
1992, U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology, Order from National Technical Information Service
Microform
in English
|
zzzz
|
|
6
Antireflecting-chromium linewidth standard, SRM 473, for calibration of optical microscope linewidth measuring systems: standard reference materials
1992, U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology, Order from National Technical Information Service
Microform
in English
|
zzzz
|
Book Details
Edition Notes
Distributed to depository libraries in microfiche.
Shipping list no.: 92-2587-M.
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| December 3, 2010 | Edited by Open Library Bot | Added subjects from MARC records. |
| December 10, 2009 | Created by WorkBot | add works page |