Papers from the First International Workshop on Plasma-Based Ion Implantation

4-6 August 1993, University of Wisconsin--Madison, Madison, Wisconsin

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Last edited by WorkBot
February 6, 2010 | History

Papers from the First International Workshop on Plasma-Based Ion Implantation

4-6 August 1993, University of Wisconsin--Madison, Madison, Wisconsin

  • 0 Ratings
  • 0 Want to read
  • 0 Currently reading
  • 0 Have read

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Edition Availability
Cover of: Papers from the First International Workshop on Plasma-Based Ion Implantation
Papers from the First International Workshop on Plasma-Based Ion Implantation: 4-6 August 1993, University of Wisconsin--Madison, Madison, Wisconsin
1994, Published for the American Vacuum Society by the American Institute of Physics
in English
Cover of: Papers from the First International Workshop on Plasma-Based Ion Implantation
Papers from the First International Workshop on Plasma-Based Ion Implantation: 4-6 August 1993, University of Wisconsin--Madison, Madison, Wisconsin
1994, Published for the American Vacuum Society by the American Institute of Physics
Unknown Binding in English

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Book Details


Edition Notes

Includes bibliographical references and index.
"Published in both 1994 March/April issue of the Journal of vacuum science and technology B, vol. 12, no. 2"--T.p. verso.

Published in
New York

Classifications

Dewey Decimal Class
621.3815/2
Library of Congress
TS695.25 .I57 1993

The Physical Object

Pagination
p. 813-998 :
Number of pages
998

ID Numbers

Open Library
OL738018M
ISBN 10
1563963442
LCCN
97129132
OCLC/WorldCat
35547175

Source records

amazon.com record

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February 6, 2010 Edited by WorkBot add more information to works
December 10, 2009 Created by WorkBot add works page