An edition of Electron-beam lithography contributions from Jena (2014)

Electron-beam lithography contributions from Jena

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Electron-beam lithography contributions from ...
Peter Hahmann
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Last edited by MARC Bot
November 4, 2020 | History
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An edition of Electron-beam lithography contributions from Jena (2014)

Electron-beam lithography contributions from Jena

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Publish Date
Publisher
Verlag Vopelius
Language
English
Pages
167

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Subjects
Vistec Electron Beam GmbH, Electron beam Lithography, History

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Edition Availability
Cover of: Electron-beam lithography contributions from Jena
Electron-beam lithography contributions from Jena
2014, Verlag Vopelius
in English
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Book Details

Edition Notes

Includes bibliographical references.

Published in
Jena

Classifications

Library of Congress
TK7874 .H28 2014

The Physical Object

Pagination
167 pages
Number of pages
167

ID Numbers

Open Library
OL30832382M
ISBN 13
9783939718802
LCCN
2015398480

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November 4, 2020 Created by MARC Bot import new book