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Subjects
Microelectromechanical systemsShowing 5 featured editions. View all 5 editions?
Edition | Availability |
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1
Understanding MEMS: Principles and Applications
2015, Wiley & Sons, Incorporated, John
in English
1119055490 9781119055495
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2
Understanding MEMS: Principles and Applications
2015, Wiley & Sons, Incorporated, John
in English
1119055504 9781119055501
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3
Understanding MEMS: principles and applications
2015, John Wiley & Sons
in English
1119055423 9781119055426
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4
Understanding MEMS: Principles and Applications
2015, Wiley & Sons, Incorporated, John
in English
1119055431 9781119055433
|
zzzz
Libraries near you:
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5
Understanding MEMS: Principles and Applications
2015, Wiley & Sons, Incorporated, John
in English
1119055512 9781119055518
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Book Details
Table of Contents
Scaling of forces
Elasticity
Bending of microstructures
Piezoresistance and piezoelectricity
Electrostatic driving and sensing
Resonators
Microfluidics and electrokinetics
Thermal devices
Fabrication.
Edition Notes
Includes bibliographical references and index.
Classifications
The Physical Object
ID Numbers
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