An edition of Emerging Lithographic Technologies XII (2008)

Emerging Lithographic Technologies XII

26-28 February 2008, San Jose, California, USA

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Emerging Lithographic Technologies XII
Frank Schellenberg
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Last edited by MARC Bot
November 14, 2020 | History
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An edition of Emerging Lithographic Technologies XII (2008)

Emerging Lithographic Technologies XII

26-28 February 2008, San Jose, California, USA

by

  • 0 Ratings
  • 0 Want to read
  • 0 Currently reading
  • 0 Have read

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Publish Date
Publisher
SPIE
Language
English
Pages
1144

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Subjects
Lithography, electron beam, Microlithography, X-ray lithography, Masks (electronics), X-rays, industrial applications, Electron beam Lithography, Congresses, Industrial applications, X-rays, Masks (Electronics)

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Edition Availability
Cover of: Emerging Lithographic Technologies XII
Emerging Lithographic Technologies XII: 26-28 February 2008, San Jose, California, USA
2008, SPIE
in English
  • Not in Library
Libraries near you: WorldCat

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Book Details

Classifications

Library of Congress
TK7874.E57 2008, TK7874 .E57 2008

ID Numbers

Open Library
OL28474284M
ISBN 13
9780819471062
LCCN
2010287918

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November 14, 2020 Edited by MARC Bot import existing book
August 2, 2020 Created by ImportBot import new book