An edition of Process and equipment control in microelectronic manufacturing II (2001)

Process and equipment control in microelectronic manufacturing II

30-31 May 2001, Edinburgh, UK

by

Process and equipment control in microelectro ...
Martin Fallon
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Last edited by MARC Bot
April 3, 2019 | History
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An edition of Process and equipment control in microelectronic manufacturing II (2001)

Process and equipment control in microelectronic manufacturing II

30-31 May 2001, Edinburgh, UK

by

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Publish Date
Publisher
SPIE
Language
English
Pages
158

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Subjects

Very large scale integration, Microelectronics industry, Microelectronics, Design and construction, Materials, Congresses, Production control, Integrated circuits

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Edition Availability
Cover of: Process and equipment control in microelectronic manufacturing II
Process and equipment control in microelectronic manufacturing II: 30-31 May 2001, Edinburgh, UK
2001, SPIE
in English
  • Not in Library
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Book Details

Edition Notes

Includes bibliographic references and index.

Published in
Bellingham, Washington
Series
SPIE proceedings series,, v. 4405, Proceedings of SPIE--the International Society for Optical Engineering ;, v. 4405.
Genre
Congresses.

Classifications

Dewey Decimal Class
621.381
Library of Congress
TK7836 .P723 2001

The Physical Object

Pagination
v, 158 p. :
Number of pages
158

ID Numbers

Open Library
OL3655971M
ISBN 10
0819441066
LCCN
2002510017
OCLC/WorldCat
47856798
Goodreads
2719156

Source records

Scriblio MARC record
Library of Congress MARC record
marc_columbia MARC record

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April 3, 2019 Created by MARC Bot import existing book