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An edition of Submicrometer metallization (1993)

Submicrometer metallization

the challenges, opportunities, and limitations : 23-25 September 1992, San Jose, California

by

Cover of: Submicrometer metallization by Krishna Shenai
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Last edited by MARC Bot
March 11, 2019 | History
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An edition of Submicrometer metallization (1993)

Submicrometer metallization

the challenges, opportunities, and limitations : 23-25 September 1992, San Jose, California

by

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Publish Date
Publisher
SPIE
Language
English
Pages
344

Subjects

Congresses Metallic films Semiconductor-metal boundaries Metallizing Electrodiffusion Integrated circuits Design and construction
Edition Availability
Cover of: Submicrometer metallization
Submicrometer metallization: the challenges, opportunities, and limitations : 23-25 September 1992, San Jose, California
1993, SPIE
in English

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Book Details

Edition Notes

Includes bibliographical references and index.

Published in
Bellingham, Wash
Series
Proceedings / SPIE--the International Society for Optical Engineering ;, v. 1805, Proceedings of SPIE--the International Society for Optical Engineering ;, v. 1805.

Classifications

Dewey Decimal Class
621.3815/2
Library of Congress
TK7874 .S848 1993

The Physical Object

Pagination
ix, 344 p. :
Number of pages
344

Edition Identifiers

Open Library
OL1747814M
ISBN 10
0819410039
LCCN
92062654
OCLC/WorldCat
28271722
Goodreads
5709395

Work Identifiers

Work ID
OL19211485W

Source records

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