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This book broadens the scope from ‘conventional’ MEMS to include issues relating to bioMEMS, NEMS, and molecular machines and the interfaces between these fields. Although originally based in silicon microelectronics technology, the reach of NEMS and MEMS is now extending to new materials such as diamond, metals and polymers, with various fabrication techniques. New materials and applications envisioned for NEMS and MEMS introduce a number of processing and packaging issues, such as biocompatibility. They also provide potential to study in situ thin-film properties with extraordinary resolution. Properly designed structures fabricated alongside NEMS and MEMS structures and integrated with advanced metrology methods provide unprecedented resolution for measuring material property. The book improves understanding of materials behavior and device issues at the micro-, nano- and molecular scale as well as the behavior and interface between micro-, nano- and molecular devices.
Topics include: micro- and nanofluids; nanotechnology and molecular machines; mechanical properties and characterization; alternative micro- and nanofabrication techniques; and surface engineering issues in MEMS structures and devices.
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Edition | Availability |
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1
Nano and Microelectromechanical Systems (NEMS and MEMS) and Molecular Machines
May 27, 2003, Materials Research Society
Hardcover
in English
1558996788 9781558996786
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WorldCat
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2
Nano- and microelectromechanical systems (NEMS and MEMS) and molecular machines: symposium held December 2-4, 2002, Boston, Massachusetts, USA
2003, Materials Research Society
in English
1558996788 9781558996786
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Libraries near you:
WorldCat
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Includes bibliographical references and indexes.
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Feedback?September 9, 2021 | Edited by ImportBot | import existing book |
January 24, 2020 | Edited by gonetofindatreasure | Edited without comment. |
January 24, 2020 | Edited by gonetofindatreasure | Edited without comment. |
January 24, 2020 | Edited by gonetofindatreasure | Edited without comment. |
March 11, 2019 | Created by MARC Bot | import existing book |