An edition of Reliability, testing, and characterization of MEMS/MOEMS (2001)

Reliability, testing, and characterization of MEMS/MOEMS

22-24 October 2001, San Francisco, USA

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Cover of: Reliability, testing, and characterization of MEMS/MOEMS by Rajeshuni Ramesham
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Last edited by MARC Bot
March 11, 2019 | History
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An edition of Reliability, testing, and characterization of MEMS/MOEMS (2001)

Reliability, testing, and characterization of MEMS/MOEMS

22-24 October 2001, San Francisco, USA

by

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Publish Date
Publisher
SPIE
Language
English
Pages
296

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Previews available in: English

Subjects

Reliability, Microelectromechanical systems, Testing, Congresses
Edition Availability
Cover of: Reliability, testing, and characterization of MEMS/MOEMS
Reliability, testing, and characterization of MEMS/MOEMS: 22-24 October 2001, San Francisco, USA
2001, SPIE
in English

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Book Details

Edition Notes

Includes bibliographical references and index.

Published in
Bellingham, Wash
Series
SPIE proceedings series ;, v. 4558, Proceedings of SPIE--the International Society for Optical Engineering ;, v. 4558.
Genre
Congresses.

Classifications

Dewey Decimal Class
621.381
Library of Congress
TK7875 .R45 2001

The Physical Object

Pagination
xxvii, 296 p. :
Number of pages
296

Edition Identifiers

Open Library
OL3579586M
ISBN 10
0819442860
LCCN
2002265591
OCLC/WorldCat
48548019

Work Identifiers

Work ID
OL19163735W

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