An edition of Emerging lithographic technologies III (1999)

Emerging lithographic technologies III

15-17 March, 1999, Santa Clara, California

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Cover of: Emerging lithographic technologies III by Yuli Vladimirsky, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, SEMI--Semiconductor Equipment and Materials International.
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Last edited by MARC Bot
July 19, 2024 | History
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An edition of Emerging lithographic technologies III (1999)

Emerging lithographic technologies III

15-17 March, 1999, Santa Clara, California

  • 0 Ratings
  • 0 Want to read
  • 0 Currently reading
  • 0 Have read

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Publish Date
Publisher
SPIE
Language
English
Pages
864

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Previews available in: English

Subjects
Electron beam Lithography, X-rays, X-ray lithography, Congresses, Masks (Electronics), Industrial applications, Microlithography, Lithography, electron beam, X-rays, industrial applications

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Edition Availability
Cover of: Emerging lithographic technologies III
Emerging lithographic technologies III: 15-17 March, 1999, Santa Clara, California
1999, SPIE
in English
Libraries near you: WorldCat

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Book Details

Edition Notes

Includes bibliographical references and author index.

Published in
Bellingham, Wash
Series
Proceedings of SPIE ;, v. 3676, Proceedings of SPIE--the International Society for Optical Engineering ;, v. 3676.
Genre
Congresses.

Classifications

Dewey Decimal Class
621.3815/31
Library of Congress
TK7874 .E525 1999, TK7874.E525 1999

The Physical Object

Pagination
2 v. (xvii, 864 p.) :
Number of pages
864

ID Numbers

Open Library
OL6805852M
Internet Archive
emerginglithogra3676unse
ISBN 10
0819431508
LCCN
00268968
OCLC/WorldCat
41946614
Goodreads
2152723

Source records

Scriblio MARC record
Better World Books record
Library of Congress MARC record
Internet Archive item record
marc_columbia MARC record

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History

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July 19, 2024 Edited by MARC Bot import existing book
July 31, 2020 Edited by ImportBot import existing book
February 18, 2019 Created by MARC Bot import existing book