An edition of ULSI process integration III (2003)

ULSI process integration III

proceedings of the international symposium

by Cor L. Claeys

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Cover of: ULSI process integration III by editors, C.L. Claeys ... [et al.] ; sponsoring division, Electronics.

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February 18, 2019 | History

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An edition of ULSI process integration III (2003)

ULSI process integration III

proceedings of the international symposium

Edition	Availability
1 ULSI process integration III: proceedings of the international symposium 2003, Electrochemical Society in English 1566773768 9781566773768	aaaa Not in Library Libraries near you: WorldCat

Book Details

Edition Notes

Includes bibliographical references and indexes.
"Includes papers that were presented at the Third Symposium on ULSI Process Integration held in Paris, France at the 203rd Meeting of the Electrochemical Society, April 28-May 2, 2003"--Pref.

Published in: Pennington, NJ
Series: Proceedings ;, v. 2003-06, Proceedings (Electrochemical Society) ;, v. 2003-06.
Genre: Congresses.
Other Titles: ULSI process integration three

Classifications

Dewey Decimal Class: 621.39/5
Library of Congress: TK7874.76 .U476 2003

The Physical Object

Pagination: xvii, 598 p. :
Number of pages: 598

ID Numbers

Open Library: OL3695593M
ISBN 10: 1566773768
LCCN: 2003100866
Goodreads: 4892233

Source records

Scriblio MARC record
Library of Congress MARC record

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Created February 18, 2019
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February 18, 2019

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ULSI process integration III

proceedings of the international symposium

by Cor L. Claeys