An edition of Science and technology of microfabrication (1987)

Science and technology of microfabrication

symposium held December 4-5, 1986, Boston, Massachusetts, U.S.A.

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Cover of: Science and technology of microfabrication by R. E. Howard
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Last edited by ImportBot
October 5, 2021 | History
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An edition of Science and technology of microfabrication (1987)

Science and technology of microfabrication

symposium held December 4-5, 1986, Boston, Massachusetts, U.S.A.

by

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Publish Date
Publisher
Materials Research Society
Language
English
Pages
373

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Previews available in: English

Subjects

Very large scale integration, Microfabrication, Congresses, Integrated circuits, Design and construction, Materials, research, Integrated circuits, very large scale integration, Manufacturing processes

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Edition Availability
Cover of: Science and Technology of Microfabrication
Science and Technology of Microfabrication: Volume 76
2014, University of Cambridge ESOL Examinations
in English
Libraries near you: WorldCat
Cover of: Science and technology of microfabrication
Science and technology of microfabrication: symposium held December 4-5, 1986, Boston, Massachusetts, U.S.A.
1987, Materials Research Society
in English
Libraries near you: WorldCat

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Book Details

Edition Notes

Includes bibliographies and indexes.
Proceedings of the Symposium on the Science and Technology of Microfabrication, sponsored by the Materials Research Society as part of its 1986 Fall Meeting.

Published in
Pittsburgh, Pa
Series
Materials Research Society symposia proceedings,, v. 76

Classifications

Dewey Decimal Class
621.381/73
Library of Congress
TK7874 .S33 1987

The Physical Object

Pagination
xvii, 373 p. :
Number of pages
373

ID Numbers

Open Library
OL2379245M
Internet Archive
sciencetechnolog0076unse
ISBN 10
0931837421
LCCN
87007749
OCLC/WorldCat
15488001

Source records

Scriblio MARC record
Better World Books record
Library of Congress MARC record
Promise Item
Internet Archive item record
marc_columbia MARC record

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October 5, 2021 Edited by ImportBot import existing book
July 31, 2020 Edited by ImportBot import existing book
February 17, 2019 Created by MARC Bot import existing book