An edition of Smart sensors, actuators, and MEMS (2003)

Smart sensors, actuators, and MEMS

19-21 May 2003, Maspalomas, Gran Canaria, Spain

by , , and

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Cover of: Smart sensors, actuators, and MEMS by Jung-Chih Chiao, Vijay K. Varadan, Carles Cané, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cosponsored by Spanish Government ... [et al.] ; cooperating organizations, Las Palmas University Foundation [and] Sociedad Española de Optica (SEDO).
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Last edited by ImportBot
July 30, 2023 | History
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An edition of Smart sensors, actuators, and MEMS (2003)

Smart sensors, actuators, and MEMS

19-21 May 2003, Maspalomas, Gran Canaria, Spain

by , , and

  • 0 Ratings
  • 0 Want to read
  • 0 Currently reading
  • 0 Have read

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Publish Date
Publisher
SPIE
Language
English
Pages
928

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Previews available in: English

Subjects
Microelectromechanical systems, Scanning systems, Congresses, Actuators, Detectors, Industrial applications, Microtechnology

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Edition Availability
Cover of: Smart sensors, actuators, and MEMS
Smart sensors, actuators, and MEMS: 19-21 May 2003, Maspalomas, Gran Canaria, Spain
2003, SPIE
in English
Libraries near you: WorldCat

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Book Details

Edition Notes

Includes bibliographical references and index.

Published in
Bellingham, Wash. USA
Series
SPIE proceedings series,, v. 5116, Proceedings of SPIE--the International Society for Optical Engineering ;, v. 5116.
Genre
Congresses.

Classifications

Library of Congress
TK7875 .S635 2003

The Physical Object

Pagination
2 v. (xxvi, 928 p.) :
Number of pages
928

ID Numbers

Open Library
OL3318191M
ISBN 10
0819449768
LCCN
2004268421
OCLC/WorldCat
52604958
Goodreads
5030744

Source records

Scriblio MARC record
Library of Congress MARC record
marc_columbia MARC record
Internet Archive item record
Internet Archive item record

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July 30, 2023 Edited by ImportBot import existing book
February 17, 2019 Created by MARC Bot import existing book