Design, test, integration, and packaging of MEMS/MOEMS 2002

6-8 May, 2002, Cannes, France

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July 29, 2023 | History

Design, test, integration, and packaging of MEMS/MOEMS 2002

6-8 May, 2002, Cannes, France

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Publish Date
Publisher
SPIE
Language
English
Pages
832

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Previews available in: English

Book Details


Edition Notes

Includes bibliographical references and index.

Published in
Bellingham, Wash
Series
SPIE proceedings series ;, v. 4755, Proceedings of SPIE--the International Society for Optical Engineering ;, v. 4755.
Genre
Congresses.

Classifications

Library of Congress
TK7875 .D47598 2002, TK7875.D47598 2002

The Physical Object

Pagination
xvii, 832 p. :
Number of pages
832

Edition Identifiers

Open Library
OL3656362M
ISBN 10
0819445185
LCCN
2002510518
OCLC/WorldCat
50034635
Goodreads
405096

Work Identifiers

Work ID
OL18832912W

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July 29, 2023 Edited by ImportBot import existing book
July 31, 2020 Edited by ImportBot import existing book
February 17, 2019 Created by MARC Bot import existing book