An edition of EUV, X-ray, and neutron optics and sources (1999)

EUV, X-ray, and neutron optics and sources

21-23 July 1999, Denver, Colorado

by , , and

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Cover of: EUV, X-ray, and neutron optics and sources by Carolyn A. MacDonald ... [et al.], chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering.
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Last edited by MARC Bot
July 9, 2024 | History
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An edition of EUV, X-ray, and neutron optics and sources (1999)

EUV, X-ray, and neutron optics and sources

21-23 July 1999, Denver, Colorado

by , , and

  • 0 Ratings
  • 0 Want to read
  • 0 Currently reading
  • 0 Have read

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Publish Date
Publisher
SPIE
Language
English
Pages
394

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Previews available in: English

Subjects
Neutron sources, Electron beam Lithography, Congresses, Ion beam lithography, X-ray optics, Extreme ultraviolet lithography, X-rays, industrial applications, Lithography, electron beam, Grenz rays

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Edition Availability
Cover of: EUV, X-ray, and neutron optics and sources
EUV, X-ray, and neutron optics and sources: 21-23 July 1999, Denver, Colorado
1999, SPIE
in English
Libraries near you: WorldCat

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Book Details

Edition Notes

Includes bibliographical references and index.

Published in
Bellingham, Wash., USA
Series
SPIE proceedings series ;, v. 3767, Proceedings of SPIE--the International Society for Optical Engineering ;, v. 3767.
Genre
Congresses.
Other Titles
Extreme ultraviolet, X-ray, and neutron optics and sources

Classifications

Dewey Decimal Class
621.36
Library of Congress
TA1775 .E88 1999, TA1775.E88 1999

The Physical Object

Pagination
x, 394 p. :
Number of pages
394

ID Numbers

Open Library
OL6900474M
Internet Archive
isbn_0819432539
ISBN 10
0819432539
LCCN
00710730
OCLC/WorldCat
43290164
Goodreads
2152725

Source records

Scriblio MARC record
Library of Congress MARC record
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July 9, 2024 Edited by MARC Bot import existing book
July 31, 2020 Edited by ImportBot import existing book
February 14, 2019 Edited by MARC Bot import existing book
February 5, 2019 Created by MARC Bot import existing book