An edition of EUV sources for lithography (2005)

EUV sources for lithography

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Cover of: EUV sources for lithography by Vivek Bakshi
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Last edited by ImportBot
December 25, 2021 | History
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An edition of EUV sources for lithography (2005)

EUV sources for lithography

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Publish Date
Publisher
SPIE Press
Language
English

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Subjects

Plasma (Ionized gases), Lithography, Ultraviolet radiation, Industrial applications, Extreme ultraviolet lithography, Plasma (ionized gases)
Edition Availability
Cover of: EUV sources for lithography
EUV sources for lithography
2005, SPIE Press
in English

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Book Details

Edition Notes

Includes bibliographical references and index.

Published in
Bellingham, Wash

Classifications

Dewey Decimal Class
621.36/4
Library of Congress
QC459 .E98 2005, QC459 .E98 2006, QC459.E98 2005

The Physical Object

Pagination
p. cm.

Edition Identifiers

Open Library
OL3409549M
ISBN 10
0819458457
LCCN
2005025505
LibraryThing
2683767
Goodreads
2403620

Work Identifiers

Work ID
OL18304044W

Source records

Scriblio MARC record
Library of Congress MARC record
Library of Congress MARC record
Better World Books record
Harvard University record

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History

Download catalog record: RDF / JSON
December 25, 2021 Edited by ImportBot import existing book
February 12, 2019 Edited by MARC Bot import existing book
February 5, 2019 Created by MARC Bot import existing book