An edition of Microelectromechanical systems--materials and devices III (2010)

Microelectromechanical systems--materials and devices III

symposium held November 30-December 2, 2009, Boston, Massachusetts, U.S.A.

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Microelectromechanical systems--materials and ...
Jörg Bagdahn
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Last edited by LC Bot
February 1, 2012 | History
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An edition of Microelectromechanical systems--materials and devices III (2010)

Microelectromechanical systems--materials and devices III

symposium held November 30-December 2, 2009, Boston, Massachusetts, U.S.A.

by

  • 0 Ratings
  • 0 Want to read
  • 0 Currently reading
  • 0 Have read

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Publish Date
Publisher
Materials Research Society
Language
English
Pages
211

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Subjects
Silicon, Microelectromechanical systems, Materials, Congresses, Nanostructured materials, Thin films

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Edition Availability
Cover of: Microelectromechanical Systems-Materials and Devices III
Microelectromechanical Systems-Materials and Devices III: Volume 1222
2014, Cambridge University Press
in English
Libraries near you: WorldCat
Cover of: Microelectromechanical systems--materials and devices III
Microelectromechanical systems--materials and devices III: symposium held November 30-December 2, 2009, Boston, Massachusetts, U.S.A.
2010, Materials Research Society
in English
  • Not in Library
Libraries near you: WorldCat

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Book Details

Edition Notes

"... papers presented at Symposium DD, 'Microelectromechanical Systems--Materials and Devices III,' held November 30-December 2 at the 2009 MRS Fall Meeting in Boston, Massachusetts"-- preface.

Includes bibliographical references and indexes.

Published in
Warrendale, Pa
Series
Materials Research Society symposium proceedings -- v. 1222, Materials Research Society symposia proceedings -- v. 1222.

Classifications

Library of Congress
TK7875 .M3723 2009

The Physical Object

Pagination
ix, 211 p. :
Number of pages
211

ID Numbers

Open Library
OL25190645M
ISBN 10
1605111953
ISBN 13
9781605111957
LCCN
2012359231
OCLC/WorldCat
646292092

Source records

Library of Congress MARC record
Library of Congress MARC record
Library of Congress MARC record
Library of Congress MARC record
Library of Congress MARC record
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