Micromachining and microfabrication process technology XV

26 January 2010, San Francisco, California, United States

Micromachining and microfabrication process t ...
Mary Ann Perez-Maher, Mary Ann ...
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Last edited by ImportBot
December 4, 2010 | History

Micromachining and microfabrication process technology XV

26 January 2010, San Francisco, California, United States

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Publish Date
Publisher
SPIE
Language
English

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Book Details


Edition Notes

Includes bibliographical references.

Published in
Bellingham, Wash
Series
Proceedings of SPIE -- v. 7590, Proceedings of SPIE--the International Society for Optical Engineering -- v. 7590.
Other Titles
Micromachining and microfabrication process technology 15, Micromachining and microfabrication process technology fifteen

Classifications

Library of Congress
TJ1191.5 .M55243235 2010, TJ1191.5.M55243235

The Physical Object

Pagination
1 v. (various pagings) :

Edition Identifiers

Open Library
OL24498476M
ISBN 10
0819479861
ISBN 13
9780819479860
LCCN
2010459436
OCLC/WorldCat
642829935

Work Identifiers

Work ID
OL15541973W

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December 4, 2010 Created by ImportBot initial import