An edition of Metallorganische Chemische Gasphasenabscheidung (MOCVD) ferroelektrischer Dünnschichten (2007)

Metallorganische Chemische Gasphasenabscheidung (MOCVD) ferroelektrischer Dünnschichten

Herstellung und Charakterisierung

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Metallorganische Chemische Gasphasenabscheidu ...
Jochen Puchalla
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January 29, 2010 | History
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An edition of Metallorganische Chemische Gasphasenabscheidung (MOCVD) ferroelektrischer Dünnschichten (2007)

Metallorganische Chemische Gasphasenabscheidung (MOCVD) ferroelektrischer Dünnschichten

Herstellung und Charakterisierung

by

  • 0 Ratings
  • 0 Want to read
  • 0 Currently reading
  • 0 Have read

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Publish Date
Publisher
Forschungszentrum Jülich, Zentralbibliothek
Language
German
Pages
164

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Subjects
Ferroelectric thin films, Metal organic chemical vapor deposition

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Cover of: Metallorganische Chemische Gasphasenabscheidung (MOCVD) ferroelektrischer Dünnschichten
Metallorganische Chemische Gasphasenabscheidung (MOCVD) ferroelektrischer Dünnschichten: Herstellung und Charakterisierung
2007, Forschungszentrum Jülich, Zentralbibliothek
in German
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Book Details

Edition Notes

"Ferroelectric crystalline thin films (FeRAM) are a possible replacement for Flash- and DRAM-memory ... lead zirconate titanate (PZT) ... PBZT films"--P. 5

Thesis (doctoral)--Rheinisch-Westfälische Technische Hochschule Aachen, 2007.

Includes bibliographical references (p. 147-154).

Text in German with abstracts in English and German.

Published in
Jülich
Series
Schriften des Forschungszentrums Jülich. Reihe Informationstechnik -- Bd. 17 = -- Information technology -- v. 66

Classifications

Library of Congress
TA418.9.T45 P83 2007

The Physical Object

Pagination
164 p. :
Number of pages
164

ID Numbers

Open Library
OL22667403M
ISBN 10
3893364927
ISBN 13
9783893364923
LCCN
2008384306

Source records

Library of Congress MARC record

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January 29, 2010 Edited by WorkBot add more information to works
December 11, 2009 Created by WorkBot add works page