An edition of Characterization of high Ge content SiGe heterostructures and graded alloy layers using spectroscopic ellipsometry (1995)

Characterization of high Ge content SiGe heterostructures and graded alloy layers using spectroscopic ellipsometry

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Characterization of high Ge content SiGe hete ...
A.R. Heyd, S.A. Alterovitz, E. ...
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January 21, 2010 | History
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An edition of Characterization of high Ge content SiGe heterostructures and graded alloy layers using spectroscopic ellipsometry (1995)

Characterization of high Ge content SiGe heterostructures and graded alloy layers using spectroscopic ellipsometry

by

  • 0 Ratings
  • 0 Want to read
  • 0 Currently reading
  • 0 Have read

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Publish Date
Publisher
National Aeronautics and Space Administration, National Technical Information Service, distributor
Language
English

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Subjects
Germanium, Algorithms, Dielectrics, Ellipsometry, Silicon compounds, Substrates

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Cover of: Characterization of high Ge content SiGe heterostructures and graded alloy layers using spectroscopic ellipsometry
Characterization of high Ge content SiGe heterostructures and graded alloy layers using spectroscopic ellipsometry
1995, National Aeronautics and Space Administration, National Technical Information Service, distributor
Microform in English
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Book Details

Published in

[Washington, D.C, Springfield, Va

Edition Notes

Shipping list no.: 97-0960-M.

Microfiche. [Washington, D.C. : National Aeronautics and Space Administration, 1995] 1 microfiche.

Series
NASA-TM -- 112114., NASA technical memorandum -- 112114.

The Physical Object

Format
Microform
Pagination
1 v.

ID Numbers

Open Library
OL15501911M

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January 21, 2010 Edited by WorkBot add subjects and covers
December 11, 2009 Created by WorkBot add works page