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An edition of Reactively sputtered films of silicon nitride for diffusion masking (1967)

Reactively sputtered films of silicon nitride for diffusion masking

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Reactively sputtered films of silicon nitride...
Dennis Richard Delzer, Dennis ...
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Last edited by WorkBot
January 18, 2010 | History
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An edition of Reactively sputtered films of silicon nitride for diffusion masking (1967)

Reactively sputtered films of silicon nitride for diffusion masking

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Publish Date
Language
English
Pages
80

Subjects

Silicon nitride Sputtering (Physics) Surfaces (Technology)
Edition Availability
Cover of: Reactively sputtered films of silicon nitride for diffusion masking
Reactively sputtered films of silicon nitride for diffusion masking
1967
in English

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Book Details

Edition Notes

Typescript (photocopy).

Thesis (M.S.)--Oregon State University, 1967.

Bibliography: p.69-71.

The Physical Object

Pagination
[9], 80 leaves, bound :
Number of pages
80

Edition Identifiers

Open Library
OL14254240M

Work Identifiers

Work ID
OL10936997W

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