An edition of ULSI process integration III (2003)

ULSI process integration III

proceedings of the international symposium

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Last edited by MARC Bot
December 8, 2020 | History
An edition of ULSI process integration III (2003)

ULSI process integration III

proceedings of the international symposium

  • 0 Ratings
  • 0 Want to read
  • 0 Currently reading
  • 0 Have read

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Publish Date
Language
English
Pages
598

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Edition Availability
Cover of: ULSI process integration III
ULSI process integration III: proceedings of the international symposium
2003, Electrochemical Society
in English

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Book Details


Edition Notes

Includes bibliographical references and indexes.
"Includes papers that were presented at the Third Symposium on ULSI Process Integration held in Paris, France at the 203rd Meeting of the Electrochemical Society, April 28-May 2, 2003"--Pref.

Published in
Pennington, NJ
Series
Proceedings ;, v. 2003-06, Proceedings (Electrochemical Society) ;, v. 2003-06.
Genre
Congresses.
Other Titles
ULSI process integration three

Classifications

Dewey Decimal Class
621.39/5
Library of Congress
TK7874.76 .U476 2003

The Physical Object

Pagination
xvii, 598 p. :
Number of pages
598

ID Numbers

Open Library
OL3695593M
ISBN 10
1566773768
LCCN
2003100866
Goodreads
4892233

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History

Download catalog record: RDF / JSON / OPDS | Wikipedia citation
December 8, 2020 Edited by MARC Bot import existing book
February 18, 2019 Edited by MARC Bot import existing book
April 16, 2010 Edited by bgimpertBot Added goodreads ID.
April 14, 2010 Edited by Open Library Bot Linked existing covers to the edition.
April 1, 2008 Created by an anonymous user Imported from Scriblio MARC record