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Microfabrication is the key technology behind integrated circuits, microsensors, photonic crystals, ink jet printers, solar cells and flat panel displays. Microsystems can be complex, but the basic microstructures and processes of microfabrication are fairly simple. Introduction to Microfabrication shows how the common microfabrication concepts can be applied over and over again to create devices with a wide variety of structures and functions. Featuring: A comprehensive presentation of basic fabrication processes An emphasis on materials and microstructures, rather than device physics In-depth discussion on process integration showing how processes, materials and devices interact A wealth of examples of both conceptual and real devices Introduction to Microfabrication includes 250 homework problems for students to familiarise themselves with micro-scale materials, dimensions, measurements, costs and scaling trends. Both research and manufacturing topics are covered, with an emphasis on silicon, which is the workhorse of microfabrication. This book will serve as an excellent first text for electrical engineers, chemists, physicists and materials scientists who wish to learn about microstructures and microfabrication techniques, whether in MEMS, microelectronics or emerging applications.
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Previews available in: English
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1
Introduction to Microfabrication
2011, Wiley & Sons, Incorporated, John
in English
1119955904 9781119955900
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2
Introduction to Microfabrication
2010, Wiley & Sons, Limited, John
in English
1119990416 9781119990413
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3
Introduction to Microfabrication
2010, Wiley & Sons, Incorporated, John
in English
1119991897 9781119991892
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4
Introduction to Microfabrication
2010, Wiley & Sons, Incorporated, John
in English
0470666722 9780470666722
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5
Introduction to Microfabrication
2005, John Wiley & Sons, Ltd.
Electronic resource
in English
0470020563 9780470020562
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