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1
Silicon Processing for the VLSI Era, Vol. 3: The Submicron MOSFET
October 1994, Lattice Press
Hardcover
in English
0961672153 9780961672157
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Book Details
Table of Contents
1. Role of Process & Device Models in Microelectronics Technology
2. Numerical Methods for Solving the Partial Differential Equations which Model Submicron Devices and Processes
3. Basic MOS Physics & MOS Capacitors
4. Long-Channel MOSFETs
5. The Submicron MOSFET
6. Isolation Structures in CMOS
7. Thin Gate Oxides: Growth & Reliability
8. Well Formation in CMOS
9. Hot-Carrier Resistant Processing & Device Structures
The Physical Object
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