An edition of Introduction to microlithography (1994)

Introduction to Microlithography (Acs Professional Reference Book)

2 edition

by , , and

Cover of: Introduction to Microlithography (Acs Professional Reference Book) by Larry F. Thompson, Murrae J. Bowden, C. Grant Willson
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Last edited by MARC Bot
February 2, 2026 | History
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An edition of Introduction to microlithography (1994)

Introduction to Microlithography (Acs Professional Reference Book)

2 edition

by , , and

This edition doesn't have a description yet. Can you add one?

Publish Date
Publisher
An American Chemical Society Publication
Language
English
Pages
540

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Subjects

Congresses Etching Plasma etching Photoresists Semiconductors Microlithography
Edition Availability
Cover of: Introduction to Microlithography (Acs Professional Reference Book)
Introduction to Microlithography (Acs Professional Reference Book)
February 10, 1998, An American Chemical Society Publication
Hardcover in English - 2 edition
Cover of: Introduction to microlithography
Introduction to microlithography
1994, American Chemical Society
in English - 2nd ed.

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Book Details

First Sentence

"The microelectronics revolution has had a profound impact on our technological society over the latter half of the twentieth century in such diverse fields as automobiles, computers and communications, medicine, energy, and home entertainment."

The Physical Object

Format
Hardcover
Number of pages
540
Dimensions
9.2 x 6 x 1.4 inches
Weight
1 ounces

Edition Identifiers

Open Library
OL8226822M
ISBN 10
0841228485
ISBN 13
9780841228481
Goodreads
1409153

Work Identifiers

Work ID
OL18892733W

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