An edition of Micromachined devices and components III (1997)

Micromachined devices and components III

29 September 1997, Austin, Texas

Micromachined devices and components III
Kevin Chau, Patrick J. French, ...
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Last edited by MARC Bot
July 12, 2024 | History
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An edition of Micromachined devices and components III (1997)

Micromachined devices and components III

29 September 1997, Austin, Texas

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Publish Date
Publisher
SPIE
Language
English
Pages
382

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Subjects

Micromachining Micromechanics Congresses Electromechanical devices
Edition Availability
Cover of: Micromachined devices and components III
Micromachined devices and components III: 29 September 1997, Austin, Texas
1997, SPIE
in English

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Book Details

Edition Notes

Includes bibliographical references and index.

Published in
Bellingham, Wash., USA
Series
SPIE proceedings series ; v. 3224, Proceedings of SPIE--the International Society for Optical Engineering ;, v. 3224.
Other Titles
Micromachined devices and components 3, Micromachined devices and components three

Classifications

Dewey Decimal Class
621.3815/2
Library of Congress
TJ163 .M4932 1997, TJ163.M4932 1997

The Physical Object

Pagination
ix, 382 p. :
Number of pages
382

Edition Identifiers

Open Library
OL418381M
ISBN 10
0819426563
LCCN
98122098
OCLC/WorldCat
37826226
Goodreads
4518912

Work Identifiers

Work ID
OL23675016W

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