Spectroscopic characterization techniques for semiconductor technology II

January 21-22, 1985, Los Angeles, California

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Last edited by MARC Bot
July 24, 2024 | History

Spectroscopic characterization techniques for semiconductor technology II

January 21-22, 1985, Los Angeles, California

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Publish Date
Language
English
Pages
169

Previews available in: English

Book Details


Edition Notes

Includes bibliographies and index.

Published in
Bellingham, Wash., USA
Series
Proceedings of SPIE--the International Society for Optical Engineering -- v. 524

Classifications

Library of Congress
TK7871.85 .S725 1985

The Physical Object

Pagination
vi, 169 p. :
Number of pages
169

Edition Identifiers

Open Library
OL14089148M
Internet Archive
isbn_0892525592_524
ISBN 10
0892525592
LCCN
85050424
OCLC/WorldCat
12307424

Work Identifiers

Work ID
OL19498887W

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