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An edition of Lithographic and micromachining techniques for optical component fabrication (2001)

Lithographic and micromachining techniques for optical component fabrication

29-30 July 2001, San Diego, USA

by

Cover of: Lithographic and micromachining techniques for optical component fabrication by Hans Peter Herzig
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Last edited by MARC Bot
November 14, 2023 | History
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An edition of Lithographic and micromachining techniques for optical component fabrication (2001)

Lithographic and micromachining techniques for optical component fabrication

29-30 July 2001, San Diego, USA

by

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Publish Date
Publisher
SPIE
Language
English
Pages
324

Previews available in: English

Subjects

Congresses Micromachining Microlithography Optical instruments Lenses Design and construction
Edition Availability
Cover of: Lithographic and micromachining techniques for optical component fabrication
Lithographic and micromachining techniques for optical component fabrication: 29-30 July 2001, San Diego, USA
2001, SPIE
in English

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Book Details

Edition Notes

Includes bibliographical references and index.

Published in
Bellingham, Wash., USA
Series
SPIE proceedings series ;, v. 4440, Proceedings of SPIE--the International Society for Optical Engineering ;, v. 4440.
Genre
Congresses.

Classifications

Dewey Decimal Class
681/.4
Library of Congress
TS510 .L577 2001

The Physical Object

Pagination
x, 324 p. :
Number of pages
324

Edition Identifiers

Open Library
OL3581018M
ISBN 10
0819441546
LCCN
2002277171
OCLC/WorldCat
48546510

Work Identifiers

Work ID
OL19407612W

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{{cite book|author=Hans Peter Herzig |date=2001 |title=Lithographic and micromachining techniques for optical component fabrication |url=https://archive.org/details/lithographicmicr4440unse |publication-place=Bellingham, Wash., USA |publisher=SPIE |isbn=0-8194-4154-6 |lccn=2002277171 |oclc=48546510 |ol=3581018M}}