An edition of Microlithography (1986)

Microlithography

process technology for IC fabrication

by

Cover of: Microlithography by David J. Elliott, David J. Elliott
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Last edited by Scott365Bot
October 22, 2023 | History
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An edition of Microlithography (1986)

Microlithography

process technology for IC fabrication

by

xix, 378 pages : 24 cm

Publish Date
Publisher
McGraw-Hill
Language
English
Pages
378

Previews available in: English

Subjects

Very large scale integration Design and construction Microlithography Integrated circuits Photoresists Integrated circuits -- Very large scale integration -- Design and construction
Edition Availability
Cover of: Microlithography
Microlithography: process technology for IC fabrication
1986, McGraw-Hill
in English

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Book Details

Edition Notes

Includes bibliographies and index.

Published in
New York

Classifications

Dewey Decimal Class
621.381/73
Library of Congress
TK7874 .E495 1986

The Physical Object

Pagination
xix, 378 p. :
Number of pages
378

Edition Identifiers

Open Library
OL2537323M
Internet Archive
microlithography0000elli
ISBN 10
0070193045
LCCN
85018196
OCLC/WorldCat
12418734

Work Identifiers

Work ID
OL2927174W

Source records

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{{cite book|author=David J. Elliott |date=1986 |title=Microlithography |url=https://archive.org/details/microlithography0000elli |publication-place=New York |publisher=McGraw-Hill |isbn=0-07-019304-5 |lccn=85018196 |oclc=12418734 |ol=2537323M}}