An edition of Integrated Circuit Metrology, Inspection, and Process Control
(1987)
Integrated Circuit Metrology, Inspection, and Process Control
by Kevin M. Monahan
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Last edited by AMillarBot
June 1, 2012 | History
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Publish Date
July 1987
Publisher
Society of Photo Optical
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| Edition | Availability |
|---|---|
1
Integrated circuit metrology, inspection, and process control: [papers]
1987, SPIE--the International Society for Optical Engineering
in English
0892528109 9780892528103
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2
Integrated Circuit Metrology, Inspection, and Process Control
July 1987, Society of Photo Optical
Paperback
0892528109 9780892528103
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- Created April 30, 2008
- 6 revisions
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| June 1, 2012 | Edited by AMillarBot | remove series from title (Proceedings of Spie--the International Society for Optical Engineering, Vol 775) |
| April 24, 2010 | Edited by Open Library Bot | Fixed duplicate goodreads IDs. |
| April 16, 2010 | Edited by bgimpertBot | Added goodreads ID. |
| April 14, 2010 | Edited by Open Library Bot | Linked existing covers to the edition. |
| April 30, 2008 | Created by an anonymous user | Imported from amazon.com record |