Chemical Vapor Deposition for Microelectronics

Principles, Technology, and Applications (Materials Science and Process Technology)

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Last edited by ImportBot
July 29, 2014 | History

Chemical Vapor Deposition for Microelectronics

Principles, Technology, and Applications (Materials Science and Process Technology)

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Publish Date
Publisher
Noyes Publications
Language
English
Pages
215

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Previews available in: English

Edition Availability
Cover of: Chemical Vapor Deposition for Microelectronics
Cover of: Chemical vapor deposition for microelectronics
Chemical vapor deposition for microelectronics: principles, technology, and applications
1987, Noyes Publications
in English

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Book Details


First Sentence

"Chemical vapor deposition (CVD) is a process where one or more gaseous species react on a solid surface and one of the reaction products is a solid phase material."

The Physical Object

Format
Hardcover
Number of pages
215
Dimensions
9.3 x 6.2 x 0.6 inches
Weight
15.8 ounces

ID Numbers

Open Library
OL8048738M
Internet Archive
chemicalvapordep00sher
ISBN 10
0815511361
ISBN 13
9780815511366
Goodreads
3583498

Source records

Internet Archive item record

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History

Download catalog record: RDF / JSON / OPDS | Wikipedia citation
July 29, 2014 Edited by ImportBot import new book
April 6, 2014 Edited by ImportBot Added IA ID.
April 24, 2010 Edited by Open Library Bot Fixed duplicate goodreads IDs.
April 16, 2010 Edited by bgimpertBot Added goodreads ID.
April 29, 2008 Created by an anonymous user Imported from amazon.com record