Reliability, testing, and characterization of MEMS/MOEMS

22-24 October 2001, San Francisco, USA

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Last edited by MARC Bot
November 14, 2023 | History

Reliability, testing, and characterization of MEMS/MOEMS

22-24 October 2001, San Francisco, USA

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Publish Date
Publisher
SPIE
Language
English
Pages
296

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Previews available in: English

Book Details


Edition Notes

Includes bibliographical references and index.

Published in
Bellingham, Wash
Series
SPIE proceedings series ;, v. 4558, Proceedings of SPIE--the International Society for Optical Engineering ;, v. 4558.
Genre
Congresses.

Classifications

Dewey Decimal Class
621.381
Library of Congress
TK7875 .R45 2001

The Physical Object

Pagination
xxvii, 296 p. :
Number of pages
296

Edition Identifiers

Open Library
OL3579586M
ISBN 10
0819442860
LCCN
2002265591
OCLC/WorldCat
48548019

Work Identifiers

Work ID
OL19163735W

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November 14, 2023 Edited by MARC Bot import existing book
July 30, 2023 Edited by ImportBot import existing book
December 5, 2020 Edited by MARC Bot import existing book
March 11, 2019 Edited by MARC Bot import existing book
April 1, 2008 Created by an anonymous user Imported from Scriblio MARC record