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Handbook of VLSI Microlithography, 2nd Edition
2001, Elsevier Science & Technology Books
in English
0815517807 9780815517801
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{{cite book|author=John N. Helbert |date=2001 |title=Handbook of VLSI Microlithography, 2nd Edition |publisher=Elsevier Science & Technology Books |isbn=978-0-8155-1780-1 |ol=35765324M}}