Handbook of VLSI Microlithography, 2nd Edition

Handbook of VLSI Microlithography, 2nd Editio...
John N. Helbert, John N. Helbe...
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Handbook of VLSI Microlithography, 2nd Edition

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Publish Date
Language
English
Edition Availability
Cover of: Handbook of VLSI Microlithography, 2nd Edition
Handbook of VLSI Microlithography, 2nd Edition
2001, Elsevier Science & Technology Books
in English

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Book Details


The Physical Object

Pagination
1022

Edition Identifiers

Open Library
OL35765324M
ISBN 13
9780815517801

Work Identifiers

Work ID
OL26471416W

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{{cite book|author=John N. Helbert |date=2001 |title=Handbook of VLSI Microlithography, 2nd Edition |publisher=Elsevier Science & Technology Books |isbn=978-0-8155-1780-1 |ol=35765324M}}