An edition of Proceedings of the Thirteenth Annual Symposium of the Greater New York Chapter of the AVS on plasma and ion-beam processing, 2 June 1982, IBM Thomas J. Watson Research Center, Yorktown Heights, New York (1982)

Proceedings of the Thirteenth Annual Symposium of the Greater New York Chapter of the AVS on plasma and ion-beam processing, 2 June 1982, IBM Thomas J. Watson Research Center, Yorktown Heights, New York

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Proceedings of the Thirteenth Annual Symposiu ...
American Vacuum Society. Great ...
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October 21, 2020 | History
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An edition of Proceedings of the Thirteenth Annual Symposium of the Greater New York Chapter of the AVS on plasma and ion-beam processing, 2 June 1982, IBM Thomas J. Watson Research Center, Yorktown Heights, New York (1982)

Proceedings of the Thirteenth Annual Symposium of the Greater New York Chapter of the AVS on plasma and ion-beam processing, 2 June 1982, IBM Thomas J. Watson Research Center, Yorktown Heights, New York

by

  • 0 Ratings
  • 0 Want to read
  • 0 Currently reading
  • 0 Have read

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Publish Date
Publisher
Published for the American Vacuum Society by the American Institute of Physics
Language
English
Pages
815

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Subjects
Congresses, Ion implantation, Plasma engineering, Sputtering (Physics)

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Edition Availability
Cover of: Proceedings of the Thirteenth Annual Symposium of the Greater New York Chapter of the AVS on plasma and ion-beam processing, 2 June 1982, IBM Thomas J. Watson Research Center, Yorktown Heights, New York
Proceedings of the Thirteenth Annual Symposium of the Greater New York Chapter of the AVS on plasma and ion-beam processing, 2 June 1982, IBM Thomas J. Watson Research Center, Yorktown Heights, New York
1982, Published for the American Vacuum Society by the American Institute of Physics
in English
  • Not in Library
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Book Details

Edition Notes

Includes bibliographical references and index.
"Also published in the 1982 September/October issue of the Journal of vacuum science and technology, vol. 21, no. 3"--T.p. verso.

Published in
New York

Classifications

Dewey Decimal Class
621.044
Library of Congress
TA2001 .P76 1982

The Physical Object

Pagination
p. 725-815 :
Number of pages
815

ID Numbers

Open Library
OL3512521M
ISBN 10
0883184052
LCCN
82073041
OCLC/WorldCat
12941917
Goodreads
2641384

Source records

Library of Congress MARC record

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History

Download catalog record: RDF / JSON / OPDS | Wikipedia citation
October 21, 2020 Edited by MARC Bot import existing book
April 26, 2011 Edited by OCLC Bot Added OCLC numbers.
April 16, 2010 Edited by bgimpertBot Added goodreads ID.
December 12, 2009 Edited by WorkBot link works
April 1, 2008 Created by an anonymous user Imported from Scriblio MARC record