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An edition of Foundations of MEMS (2005)

Foundations of MEMS

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Cover of: Foundations of MEMS by Liu, Chang Ph.D., Liu, Chang Ph.D.
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  • 4 Want to read
This book is currently unavailable on Open Library, check out available alternatives.
Last edited by MARC Bot
July 21, 2025 | History
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An edition of Foundations of MEMS (2005)

Foundations of MEMS

by

  • 4 Want to read

This edition doesn't have a description yet. Can you add one?

Publish Date
Publisher
Pearson Prentice Hall, Prentice Hall, Pearson/Prentice Hall
Language
English
Pages
530

Previews available in: English

Subjects

Microelectromechanical systems Microelectronics Micromechanics MEMS
Edition Availability
Cover of: Foundations of MEMS
Foundations of MEMS
2005, Pearson Prentice Hall, Prentice Hall, Pearson/Prentice Hall
in English

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Book Details

Edition Notes

Includes index.

Published in
Upper Saddle River, NJ

Classifications

Dewey Decimal Class
621.3
Library of Congress
TK7875 .L48 2005, TK7875 .L48 2006, TK7875.L48 2005

The Physical Object

Pagination
p. cm.
Number of pages
530

Edition Identifiers

Open Library
OL3425513M
ISBN 10
0131472860
LCCN
2005048932
OCLC/WorldCat
60550857
Goodreads
911365

Work Identifiers

Work ID
OL5847833W

Source records

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{{cite book|author=Liu, Chang Ph.D. |date=2005 |title=Foundations of MEMS |url=https://archive.org/details/foundationsofmem0000liuc |publication-place=Upper Saddle River, NJ |publisher=Pearson Prentice Hall |isbn=0-13-147286-0 |lccn=2005048932 |oclc=60550857 |ol=3425513M}}