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Micromachining and imaging: 13 February 1997, San Jose, California
1997, SPIE
in English
081942420X 9780819424204
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Includes bibliographical references and index.
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{{cite book|date=1997 |title=Micromachining and imaging |url=https://archive.org/details/micromachiningim3009unse |publication-place=Bellingham, Wash., USA |publisher=SPIE |isbn=0-8194-2420-X |lccn=2004297616 |oclc=37043100 |ol=3324490M}}

