An edition of Advances in Metrology for X-Ray and EUV Optics V (2014)

Advances in Metrology for X-Ray and EUV Optics V

by , , and

Advances in Metrology for X-Ray and EUV Optic ...
Lahsen Assoufid, Haruhiko Ohas ...
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Last edited by ImportBot
August 5, 2020 | History
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An edition of Advances in Metrology for X-Ray and EUV Optics V (2014)

Advances in Metrology for X-Ray and EUV Optics V

by , , and

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Publish Date
Publisher
SPIE
Language
English
Pages
158

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Subjects

Optical measurements, Optical instruments, Measuring instruments, Interferometers, Measurement

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Edition Availability
Cover of: Advances in Metrology for X-Ray and EUV Optics V
Advances in Metrology for X-Ray and EUV Optics V
2014, SPIE
in English
  • Not in Library
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Book Details

Classifications

Library of Congress
QC367.A3385 2014

ID Numbers

Open Library
OL28596324M
ISBN 13
9781628412338

Source records

Better World Books record

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August 5, 2020 Created by ImportBot Imported from Better World Books record