Crucial Issues in Semiconductor Materials and Processing Technologies

Proceedings of the NATO Advanced Study Institute on Semiconductor Materials and Processing Technologies Erice, Italy 1-13 July 1991

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Last edited by ImportBot
March 1, 2022 | History

Crucial Issues in Semiconductor Materials and Processing Technologies

Proceedings of the NATO Advanced Study Institute on Semiconductor Materials and Processing Technologies Erice, Italy 1-13 July 1991

Semiconductors lie at the heart of some of the most important industries and technologies of the twentieth century. The complexity of silicon integrated circuits is increasing considerably because of the continuous dimensional shrinkage to improve efficiency and functionality. This evolution in design rules poses real challenges for the materials scientists and processing engineers. Materials, defects and processing now have to be understood in their totality. World experts discuss, in this volume, the crucial issues facing lithography, ion implication and plasma processing, metallization and insulating layer quality, and crystal growth. Particular emphasis is placed upon silicon, but compound semiconductors and photonic materials are also highlighted. The fundamental concepts of phase stability, interfaces and defects play a key role in understanding these crucial issues. These concepts are reviewed in a crucial fashion.

Publish Date
Language
English
Pages
564

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Previews available in: English

Book Details


Edition Notes

Published in
Dordrecht
Series
NATO ASI Science, Series E: Applied Sciences, 0168-132X -- 222, NATO ASI Science, Series E: Applied Sciences -- 222.
Other Titles
Proceedings of the NATO Advanced Study Institute on Semiconductor Materials and Processing Technologies, Erice, Italy, July 1-13, 1991

Classifications

Library of Congress
TK7800-8360

The Physical Object

Format
[electronic resource] :
Pagination
1 online resource (564 pages 51 illustrations).
Number of pages
564

ID Numbers

Open Library
OL27028165M
Internet Archive
crucialissuessem00kolb
ISBN 10
940112714X
ISBN 13
9789401127141
OCLC/WorldCat
840309570

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March 1, 2022 Edited by ImportBot import existing book
June 29, 2019 Created by MARC Bot Imported from Internet Archive item record