An edition of Optical microlithography XXI
(2008)
Optical microlithography XXI
26-29 February 2008, San Jose, California, USA
by Harry J. Levinson
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Optical microlithography XXI: 26-29 February 2008, San Jose, California, USA
2008, SPIE
in English
0819471097 9780819471093
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Includes bibliographical references and author index.
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- Created November 16, 2010
- 4 revisions
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| November 14, 2020 | Edited by MARC Bot | import existing book |
| October 9, 2020 | Edited by ImportBot | import existing book |
| August 2, 2020 | Edited by ImportBot | import existing book |
| November 16, 2010 | Created by ImportBot | Imported from Library of Congress MARC record |