An edition of Device and process technologies for microelectronics, MEMS, and photonics IV (2006)

Device and process technologies for microelectronics, MEMS, and photonics IV

12-14 December 2005, Brisbane, Australia

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Device and process technologies for microelec ...
Jung-Chih Chiao
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Last edited by ImportBot
October 29, 2010 | History
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An edition of Device and process technologies for microelectronics, MEMS, and photonics IV (2006)

Device and process technologies for microelectronics, MEMS, and photonics IV

12-14 December 2005, Brisbane, Australia

by

  • 0 Ratings
  • 0 Want to read
  • 0 Currently reading
  • 0 Have read

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Publish Date
Publisher
SPIE
Language
English

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Subjects
Photonics, Microelectromechanical systems, Photomechanical processes, Congresses, Photolithography

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Edition Availability
Cover of: Device and process technologies for microelectronics, MEMS, and photonics IV
Device and process technologies for microelectronics, MEMS, and photonics IV: 12-14 December 2005, Brisbane, Australia
2006, SPIE
in English
  • Not in Library
Libraries near you: WorldCat
Cover of: Device and Process Technologies for Microelectronics, Mems, and Photonics 4
Device and Process Technologies for Microelectronics, Mems, and Photonics 4
January 16, 2006, Society of Photo Optical
Hardcover in English
Libraries near you: WorldCat

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Book Details

Edition Notes

Earlier conferences have title: Device and process technologies for MEMS, microelectronics, and photonics.

Includes bibliographical references and index.

Published in
Bellingham, Wash
Series
Proceedings of SPIE -- v. 6037, Proceedings of SPIE--the International Society for Optical Engineering -- v. 6037.

Classifications

Dewey Decimal Class
621.381
Library of Congress
TK7875 .D4825 2006

The Physical Object

Pagination
1 v. (various pagings) :

ID Numbers

Open Library
OL24399811M
ISBN 10
0819460680
LCCN
2006282918
OCLC/WorldCat
63519777

Source records

Library of Congress MARC record

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October 29, 2010 Created by ImportBot Imported from Library of Congress MARC record