Proceedings of the First International Symposium on Advanced Materials for ULSI

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Last edited by MARC Bot
July 24, 2024 | History

Proceedings of the First International Symposium on Advanced Materials for ULSI

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Publish Date
Language
English
Pages
246

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Book Details


Edition Notes

Includes bibliographies and index.
"[Sponsored by] Electronics, Dielectrics and Insulation, and High Temperature Materials Divisions [of the Electrochemical Society]".

Published in
Pennington, NJ (10 S. Main St., Pennington 08534-2896)
Series
Proceedings / Electrochemical Society ;, v. 88-19, Proceedings (Electrochemical Society) ;, v. 88-19.
Other Titles
Advanced materials for ULSI.

Classifications

Dewey Decimal Class
621.39/5
Library of Congress
TK7874 .I59238 1988

The Physical Object

Pagination
vi, 246 p. :
Number of pages
246

Edition Identifiers

Open Library
OL2069550M
LCCN
88082409
OCLC/WorldCat
19281926

Work Identifiers

Work ID
OL4659859W

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